In this study, silica-based transparent organic-inorganic hybrid films were prepared by the sol-gel method. Tetraethoxysilane and 3-(trimethoxysilyl)propyl methacrylate were used as the inorganic and organic compounds, respectively. Lanthanide complexes [Eu(phen)(2)]Cl-3 were incorporated into the organically modified silicates (ORMOSIL) and the luminescence properties of the resultant hybrid films (ORMOSIL:[Eu(phen)(2)]Cl-3) were characterized. The relative quantum efficiency was observed higher and the lifetimes were longer in hybrid films than those in pure silica films. Furthermore, thermal stability of hybrid films incorporating various concentration of Eu(III) complex was studied.