Thin Solid Films, Vol.386, No.2, 173-176, 2001
Applications of TiO2 film for environmental purification deposited by controlled electron beam-excited plasma
Taking advantage of the remarkable features of controlled electron beam-excited plasma (EBEP), the composition and the thickness of TiO2 film could be directly controlled by the EBEP accelerating voltage V-A and discharge current I-D, respectively. Experiments were conducted on the dissolving effect on NOx (NO, NO2) gas using glass beads coated with a TiO2 film deposited by EBEP. With a bead sample size of 20 g and an NO gas flow rate of 100 ml/min, the NO dissolvable amount was approximately 10(-4) mol/m(2) for 120 min. Using a glass plate, glass beads and zeolites coated with TiO2 film, the experiments succeeded in dissolving water-soluble ink and in obtaining a hydrophilic effect.