Nanostructures down to a few tens of nanometers in size have been fabricated with both poly(3(2(5cholorobenzotriazolo)ethyl)thiophene Langmuir-Blodgett film and self-assembled mixed monolayers of 1,12-diaminododecanedihydrochloride and n-tridecylamine . hydrochloride by the interaction with electrons emitted from a tip of AFM. The effect of functional groups of molecules on the AFM anodization has been studied in the optimized process conditions.