화학공학소재연구정보센터
Thin Solid Films, Vol.394, No.1-2, 1-15, 2001
Review of the filtered vacuum arc process and materials deposition
The problem of removing macroparticle contamination from cathodic arc deposition technology has been addressed by several techniques. These techniques have been sufficiently successful that in recent years improved coatings have been developed and advanced applications are starting to appear. The present paper is a review of these advances and the properties of new materials synthesised using different filtered cathodic arc configurations.