Journal of Vacuum Science & Technology A, Vol.19, No.2, 499-502, 2001
Comparison of pulsed laser deposition CNx films grown from organic and inorganic targets
A comparative study of CNx films grown by pulsed laser ablation from organic and inorganic targets has been reported. An ArF excimer laser (193 nm) was used to ablate pure glassy graphite (>99, 95%) and guanazole (3,5 diamino 1,2,4 triazol) targets in a reactive atmosphere of ammonia. Changes in thickness and properties of the CNx films were studied by profilometry, Fourier transform infrared and energy dispersive x-ray spectroscopies. Additional information on the film bonding configuration was obtained by a controlled thermal effusion system. The role of the target materials on the CNx film growth rate, composition and bonding configuration was investigated. We find that the ablation of organic targets in a NH3 atmosphere leads to films with nitrogen content near to stoichiometric values (57 at.%) and a wider variety of carbon-nitrogen bonds. Also, the formation of C-N single bonds is promoted and the thermal desorption spectra give interesting information about film structural changes. Finally, the thermal stability of the films grown from both compounds is discussed.