화학공학소재연구정보센터
Journal of Vacuum Science & Technology A, Vol.19, No.4, 1346-1352, 2001
Simulation of the production of atomic hydrogen in a low-pressure-arc-discharge-based source
A model is proposed to simulate the production of atomic hydrogen in a low-pressure arc discharge. As a first step of simulation, the electron and ion densities, the currents of ions and fast and plasma electrons, and the currents of thermionic emission and secondary electrons have been calculated and then. based on the criterion for self-sustaining of the discharge current, calculations of the current-voltage characteristics are in good agreement with those obtained experimentally. The second step of simulation involved calculations of the atomic hydrogen production rates. The model takes into account the following mechanisms for the generation and death of hydrogen atoms: impact dissociation of molecules by fast electrons. dissociation by plasma thermal electrons, dissociation at the surface of a self-heating cathode, and recombination of atoms at cold walls of a discharge cell. A theoretical analysis has shown that the three channels for the generation of atomic hydrogen make comparable contributions to the average rate of generation of atomic particles. Comparison of experimental and calculated dependences of the atomic hydrogen density on the discharge parameters shows that the proposed model provides an adequate description of the process of production of atomic hydrogen.