화학공학소재연구정보센터
Journal of Vacuum Science & Technology B, Vol.18, No.2, 713-716, 2000
Fabrication of dielectric hollow submicrometric pipes
A simple technique to obtain an array of hollow submicrometric titanium oxide pipes is described. Initially, a submicrometric structure is formed in a positive photoresist by holographic exposure, followed by the deposition of the titanium oxide film and the removal of the photoresist by an appropriate solvent. These structures may be useful as waveguides for x-ray and neutron capillary optics.