Journal of Vacuum Science & Technology B, Vol.18, No.2, 1115-1118, 2000
SiC field emitter arrays fabricated by transfer mold technique
The field emission arrays of SiC sharp emitter tips have been produced for the first time by use of the transfer mold technique. The test structures of active gun, containing approximately 3 x 10(4) of emitters, were prepared. The field emission current and work function calculations for SiC emitter arrays have been presented.