Journal of Vacuum Science & Technology B, Vol.18, No.5, 2441-2445, 2000
Gas-sensing device implemented on a micromachined membrane: A combination of thick-film and very large scale integrated technologies
We report developing a SnO2 thick-film gas sensor deposited by screen printing onto a micromachined dielectric stacked membrane equipped with an embedded polysilicon microheater and two resistors for temperature measurement. The microheaters were designed to enable an operating temperature of 400 degreesC at about 30 mW power consumption. A newly developed scheme for temperature measurement was adopted for on-line adjustment of the film temperature through a conventional low-power feedback circuit. The electrical response of the prototypes to CO and CH4 is discussed, and their performance is compared to traditional devices fabricated via thick-film methods.