Journal of Vacuum Science & Technology B, Vol.18, No.6, 3099-3104, 2000
Advances in arrayed microcolumn lithography
A microcolumn array has been designed, fabricated, and tested. The 2 X 2 array has a 2 cm pitch ana operates at 1 keV. Key components include vertical interconnects, silicon low-distortion octupole deflectors, miniature long-range flexure-based rip positioners, and low-power thermal field emitters. Initial results show no observable crosstalk between columns during simultaneous operation at a 50 MHz beam blanking rate. Preliminary lithography results are presented.