Journal of Vacuum Science & Technology B, Vol.18, No.6, 3582-3585, 2000
Master replication into thermosetting polymers for nanoimprinting
Replication of the e-beam master into thermosetting polymers was investigated for low cost working stamp fabrication for nanoimprint lithography (Nn). Negative as well as positive replicas from a master were fabricated in a thermal replication step from duroplastic material. Without any further treatment these working stamps were able to imprint thermoplastic polymers. To demonstrate the procedure we used the custom polymers mr-I-8130 and mr-I-9030 as well as PMMA for comparison. All replications were done in a NIL process. The replication quality is excellent when a suitable imprint procedure is used.