The annealing of (Ba,Sr)RuO3 films which are structurally and chemically matched with (Ba,Sr)TiO3 films was performed in oxygen and nitrogen atmospheres in the temperature range of 600-750 degreesC for 30 min. The effects of annealing the (Ba,Sr)RuO3 on the physical and electrical properties of the (Ba,Sr)TiO3 films were investigated. The x-ray diffraction peak of the annealed (Ba,Sr)RuO3 film at high temperatures revealed that the (Ba,Sr)TiO3 film is thermally more stable than RuO2. The (Ba,Sr)RuO3 film under N-2 annealed showed lower electrical resistivity and larger surface roughness compared with those under O-2 In addition, from the sequential two-step annealing process using O-2 and N-2, and by reversing the annealing sequence, the electrical resistivity and the surface roughness of the (Ba,Sr)RuO3 film turned out to be reversible. The (Ba,Sr)TiO3 film on the N-2 annealed (Ba,Sr)RuO3 showed a higher leakage current than that on the O-2 annealed bottom electrode because rough surface can cause a high local electric field. The dielectric constant of the (Ba,Sr)TiO3 thin film increased with the annealing temperature of the (Ba,Sr)RuO3 bottom electrode regardless of the annealing atmosphere.