화학공학소재연구정보센터
Journal of Vacuum Science & Technology B, Vol.19, No.3, 671-674, 2001
Growth and structure of aligned B-C-N nanotubes
Aligned B-C-N nanotubes were prepared by bias assisted hot filament chemical vapor depositionfrom source gases of H-2, N-2, CH4, and B2H6. Various morphologies were obtained at different growth conditions. The area density of the nanotubes increases with increasing discharge current. The nanotubes grow along the direction of the electrical field. Dense and highly oriented B-C-N nanotubes were obtained at 620 degreesC and high discharge current. The growth temperature has effects on the tube diameter and the nanotubes grown at higher temperature are thinner than that at lower temperature. The B concentration of the deposits increases with increasing the B2H6 concentration. in gas mixture and various B:C:N ratios of 10:81:9, 16:73:11, and 34:42:24 were obtained at different gas composition.