Journal of Vacuum Science & Technology B, Vol.19, No.3, 675-682, 2001
Scanning field-emission force microscopy and spectroscopy of chemical-vapor-deposited carbon field-emission cathodes
A scanning-force microscope with an electrically conducting tip was used in both contact and noncontact scanning-polarization force microscopy modes to study the field-emission properties of diamond-like carbon chemical-vapor-deposited films in vacuum. Using the tip as an anode, the emission current and work function were measured with 100 nm lateral resolution. Emission was detected from individual micron-size grains. Large current fluctuations on a ms time scale were observed, correlated with large changes in surface potential, possibly due to charge trapping. There were no significant differences in work function between emitting and nonemitting regions, but the emitting regions showed low conductivity and large band gaps, while the nonemitting regions were either insulating or highly conductive. No asperities were observed at the film-vacuum interface. The current dependence on tip-sample separation suggests that emission occurs below, and not at, the film-vacuum interface.