Zinc oxide (ZnO) luminescent thin films have been prepared on ITO-glass substrates by pulsed laser deposition with a KrF excimer laser. We investigated the luminance of the ZnO films depending on laser fluence and the effects of postannealing. We have tested the crystallinity of the samples by x-ray diffraction and analyzed the growth mechanism to explain high-quality ZnO luminescent thin-film preparation by adjusting laser fluence and postannealing treatment.