Previous Article Next Article Table of Contents Journal of Materials Science Letters, Vol.19, No.18, 1625-1627, 2000 DOI10.1023/A:1006701823810 Export Citation Microstructure and preferred orientation in rf sputter deposited AlN thin film Fujiki M, Takahashi M, Kikkawa S, Kanamaru F Please enable JavaScript to view the comments powered by Disqus.
