Previous Article Next Article Table of Contents Journal of Materials Science Letters, Vol.20, No.6, 565-568, 2001 DOI10.1023/A:1010945004119 Export Citation The effect of CF4 and CHF3 gas on the etching characteristics of Er-doped glass Park KH, Lee S, Kwon KH, Moon JH Please enable JavaScript to view the comments powered by Disqus.