Experimental Study on Spin Coated Thin Cover Layer for High Numerical Aperture Optical Disc

Dohoon Chang; Myongdo Ro; Duseop Yoon; Insik Park; Dongho Shin; Jinhwan Kim

Korea Polymer Journal, Vol.9, No.6, 313-318, December, 2001

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Experimental Study on Spin Coated Thin Cover Layer for High Numerical Aperture Optical Disc

Dohoon Chang, Myongdo Ro, Duseop Yoon, Insik Park, Dongho Shin, and Jinhwan Kim^{1, †}

High Density Recording Group, Digital Media R&D Center, Samsung Electeonics, Suwon, Kyunggi 442-742, Korea
¹Polymer Sci. and Eng. Dept. and Polymer Technology Institute, Sungkyunkwan University, Suwon, Kyunggi 440-746, Korea

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The present study relates to a method of manufacturing 100 μm thick cover layer for the high density digital versatile disc system (HD-DVD), which uses a high numerical aperture of 0.85 at 405 nm wavelength. Spin coating technique was investigated as means for manufacturing the cover layer within sufficient margins of thickness variation and with good mechanical properties including small radial and tangential tilts. The influence of processing variables such as spinning speed, spinning time, and dispensing position was investigated. The effect of viscosity of UV-curable resin was also investigated.

[References]

Narahara T, Kobayashi S, Hattori M, Shimpuku Y, van den Enden G, Kahlman J, Jpn. J. Appl. Phys., 39, 919 (2000)
Nakamura S, Fasol S, The Blue Diode Laser, Spring Verlag, Berlin, 1997 (1997)
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[Related Articles]

[1] Narahara T, Kobayashi S, Hattori M, Shimpuku Y, van den Enden G, Kahlman J, Jpn. J. Appl. Phys., 39, 919 (2000)

[2] Nakamura S, Fasol S, The Blue Diode Laser, Spring Verlag, Berlin, 1997 (1997)

[3] Tieke B, Dekker M, Pfeffer N, van Woudenberg R, Zhou GF, Ubbens IPD, Jpn. J. Appl. Phys., 39, 762 (2000)

[4] Ichimura I, Maeda F, Osato K, Yamamoto K, Kasami Y, Jpn. J. Appl. Phys., 39, 937 (2000)

[5] Yamamoto K, Osto K, Ichimura I, Maeda F, Watanabe T, Jpn. J. Appl. Phys., 36, 456 (1997)

[6] Martynov YU, Hendriks B, Zijp F, Aarts J, Baartman J, van Rosmalen G, Schleipen J, van Houten H, Jpn. J. Appl. Phys., 38, 1786 (1986)

[7] Decre MMJ, Vromans PHGM, Jpn. J. Appl. Phys., 39, 775 (2000)

[8] Emslie AG, Bonner FT, Peck LG, J. Appl. Phys., 29, 858 (1958)

[9] Meyerhofer D, J. Appl. Phys., 49, 3993 (1978)