The induction period of dehydrogenation and aromatization of methane over Mo/HZSM-5 was studied by combining a pulse reaction method with TPSR, UV laser Raman, and C-13 CPMAS NMR techniques. BET and XRD results showed that Mo species were well dispersed on/in the zeolite. TPSR in CH4 stream revealed that Mo species were reduced in at least two different stages before the formation of benzene. TPR results were in agreement with TPSR results. The two stages might be attributed to the reduction of two kinds of Mo6+ species to low valence Mo species. One was polymolybdate MoO3, and the other was crystalline MoO3. UV Raman spectra showed the existence of octahedrally coordinated polymolybdate species. XRD, however, did not detect any crystalline MoO3, possibly because they were too small to be detected with this technique. Pulse reaction results indicated that pre-reduction of the catalyst and formation of carbonaceous deposit could shorten the induction period. It is concluded that the formation of active sites during the induction period via partial reduction of Mo6+ species and formation of carbonaceous deposit on partially reduced Mo species is of significance for methane aromatization over Mo/HZSM-5.