The removal of copper oxide using acetic acid at low temperatures was investigated. Acetic acid removes a variety of copper oxides, including cuprous oxide, cupric oxide, and cupric hydroxide without attacking the underlying copper film. The removal of these oxides was determined by X-ray photoelectron spectroscopy. Acetic acid can tolerate up to 4 vol % water dilution without hindering the oxide removal while producing an oxide-free surface. However, if a deionized water rinse is performed after an acetic acid treatment, a surface film of cupric hydroxide forms immediately. An acetic acid treatment at 35 degreesC without a water rinse removes the native copper oxide and produces an oxide-free, streak-free copper surface.