Thin films of functional organic compound. copper phthalocyanine (Cu-Pc). are fabricated on the (001) surfaces of alkali halides (NaCl. KCI and KBr) and tin-doped indium oxide (ITO) by physical vapor deposition (PVD) technique. Dependence of sizes and distances between adjacent crystallites on substrate temperatures is evaluated from morphological observation by scanning electron microscope to determine the activation energies for crystal growth and surface migration of molecules. Increasing substrate temperature, the size and distance corresponding to the growth and diffusion rates, respectively, tend to increase. Particularly in the case of Cu-Pc on alkali halides, plate and tetrahedral crystals having different molecular orientations with respect to the surface appear depending on the kind of substrates and deposition conditions.