A stepwise growth of oligonucleotides on silicon wafer and fused silica is described. Spectroscopic analysis such as ellipsometry and UV-Vis spectroscopy, and contact angle measurement after each synthetic step have confirmed that a 15-mer oligonucleotide was successfully grown on the hexaethylene glycol linker bound to a silicon wafer or fused silica via a glycidoxypropylsilane.