Hydroxyapatite (HAp) coating, which is popularly used for dental and orthopedic prostheses, was prepared by using the electron beam deposition (EBD) method. The electron beam was used to evaporate the stoichiometric HAp target. The coated samples were heat-treated to obtain a crystalline phase. X-Ray diffractometer (XRD) analysis revealed that the as-deposited film was amorphous and a HAp-type structure was obtained from the post-heat-treatment of the deposited films. Scanning electron microscope (SEM) observations showed that all the samples were relatively uniform with no occurrence of cracks after annealing at 1000 and 1200 degreesC. Energy dispersive X-ray (EDX) spectroscopy analysis found that the Ca/P ratios for the annealed samples were slightly higher than the stoichiometry, suggesting the dissolution of phosphorus at higher temperature. Analysis of changes in the proton induced X-ray emission (PIXE) spectra revealed that coatings exposed to higher annealing temperatures exhibited a higher degree of reduction in the P and Ca contents. Adhesion strength of the samples is found to be comparable with other coatings produced by various methods.