Thin Solid Films, Vol.400, No.1-2, 81-84, 2001
Application of pulsed liquid-injection MOCVD to the growth of ultrathin epitaxial oxides for magnetic heterostructures
We illustrate the capabilities of pulsed-liquid injection metal-organic chemical vapor deposition in the nano-engineering of complex oxides with results obtained on (La0.7Sr0.3MnO3/SrTiO3)(15) (LSMO/STO) superlattices. Superlattices with ultrathin films of a few monolayers have been successfully prepared, as shown by synchrotron radiation diffraction experiments. Lane oscillations were observed between the satellite peaks, indicating a smooth upper surface. Sets of superlattices with varying LSMO or STO thickness were synthesized on different substrates (LaAlO3, SrTiO3, MgO). By varying the relative thickness of each compound and changing the substrate, the strain in the stackings could be changed.
Keywords:metal-organic chemical vapor deposition (MOCVD);superlattice;heterostructure;manganite;strain