We developed a novel transparent conductive film, molybdenum-doped indium oxide (IMO). Using normal thermal reactive evaporation without any special treatments, IMO films have been prepared on normal glass microscope slides at about 350degreesC with electrical resistivity of 1.7 X 10(-4) Omega cm, mobility over 100 cm(2) V-1 s(-1), and an average spectral transmittance in the visible region over 80%. From x-ray photoelectron spectroscopy and x-ray diffraction spectra of the IMO films, it is confirmed that the lattice of IMO is the same as that of In2O3 of cubic bixbyite structure, Mo6+ substitutes for In3+ in In2O3, and there are no new compounds in IMO. The valence difference of 3 between Mo6+ and In3+ is of great advantage to the IMO film with high conductivity and high transparency simultaneously.