A thermal model of selective area laser deposition of titanium nitride on a finite slab under irradiation by a stationary or a moving laser beam is presented in this paper. Heat transfer in the substrate and gases, the chemical reaction on the substrate's top surface, and the mass transfer of gases in the chamber were taken into account in the model. For the cases of the stationary laser beam, the predicted deposited film profile was in good agreement with the experimental results. For the cases of the moving laser beam, the deposited film became higher and wider when the scanning velocity was decreased or the laser power was increased. Because of the low sticking coefficient of TiN at high temperature, a groove appeared on the top of the deposited film when high laser power was applied.