Journal of Vacuum Science & Technology B, Vol.20, No.1, 479-482, 2002
Capacitance sensor with sub-zeptofarad ((10-21) F) sensitivity for scanning capacitance microscopy
In this article we compare several different configurations of capacitance sensors based on a coupled transmission line design. The performance of these designs is compared in a well-defined test fixture. Sensitivities as low as 0.71 X 10(-21) F/rootHz have been measured. Sample loading and parasitic effects are discussed.