SnO<SUB>2</SUB> 후막소자의 감도특성에 미치는 SiO<SUB>2</SUB>의 영향

손종락; 조성국; 박효덕; 이덕동

HWAHAK KONGHAK, Vol.32, No.4, 525-532, August, 1994

Export Citation

SnO₂ 후막소자의 감도특성에 미치는 SiO₂의 영향

Effect of SiO₂ on Sensing Characteristics of SnO₂-Based Thick Film Devices

손종락, 조성국, 박효덕, 이덕동

초록

짐적법, sputtering법 및 분말첨가법으로 SiO₂가 첨가된 SuO₂/Al₂O₃/Nb₂O₅후막소자를 제조하고 CH₃CN 증기에 대한 감지특성을 연구하였다. 이 중에서 Si(C₂H₅O)₄ 용액의 침적법으로 제조된 소자가 가장 좋은 감도와 선택성을 나타내었다. 적외선 스펙트라를 분석한 결과 SiO₂가 첨가되지 않은 SnO₂/Al₂O₃/Nb₂O₅ 후막소자상에서의 CH₃-CN의 산화반응에 의한 생성물은 주로 CO₂, H₂O 및 NH₃였으며 SiO₂가 첨가된 SnO₂/Al₂O₃/Nb₂O₅ 소자상에서는 CO₂,H₂O, N₂O, HNO₃ 및 HNO₂가 관찰되었다. CH₃CN의 산화반응으로 생성된 질소화합물의 존재로 SiO₂가 첨가된 후막소자는 CH₃CN 증가에 대하여 높은 선택성과 부감용을 나타내었다. Nb₂O₅의 최적 첨가량은 1.0wt%이었으며 최적 동작온도는 300℃였다.

The SnO₂/Al₂O₃/Nb₂O₅ thick film devices added with SiO₂ were fabricated by dipping, sputtering and addition of SiO₂powder, and the sensing characteristics to CH₃CN vapor was investigated. Among them, the device fabricated by dipping of Si(C₂H₅)₄solution showed high sensitivity and selectivity to CH₃CN vapor. From the results of infrared spectra, the products formed by the oxidation reaction of CH₃CN on the SnO₂/Al₂O₃/Nb₂O₅thick film devices without addition of SiO₂ were found to be mainly CO₂, H₂O and NH₃, while on the SnO₂/Al₂O₃/Nb₂O₅added with SiO₂, products such as CO₂, H₂O, N₂O, HNO₃ and HNO₂ were observed. The thick film devices added with SiO₂showed high selectivity and negative sensitivity to CH₃CN vapor by means of the presence of nitrogen compounds produced through the oxidation reaction of CH₃CN. Optimum amount of Nb₂O₅and operating temperature were 1.0wt% and 300℃, respectively.

[References]

Mokwa W, Kohl D, Heiland G, Sens. Actuator, 8, 101 (1986)
Eguchi K, Cauhane JS, Lucat C, Videau JJ, Sens. Actuator, 17, 319 (1989)
Weixing Z, Lingjuan Z, Sens. Actuator, 19, 117 (1989)
Schierbaum KD, Sens. Actuator, 1, 171 (1989)
Coles GSV, Williams G, Sens. Actuator, 3, 7 (1991)
Anderson JR, Boudact M, "Catalysis Science and Technology," 3, Springer-Verlag, Berlin Heidelberg, New York (1982)
Sales BC, Surf. Sci., 112, 272 (1981)
Yamazoe N, Kurokawa Y, Seiyma T, Sens. Actuators, 4, 283 (1991)
Coles GSV, Bond SE, Williams G, Sens. Actuators B-Chem., 4, 485 (1991)
Nanto H, Sokooshi H, Usuda T, Transducers, 91, 596 (1991)
Yasunaga S, Sunahara S, Ihokura K, Transducers, 85, 393 (1985)
Moon SM, "Chemical Product Dictionary," 한국사전연구원, p. 858
Park HD, Jo SG, Sohn JR, Lee DD, J. Korean Sens. Soc., 1, 107 (1992)
Sohn JR, Cho SG, Park HD, Lee DD, HWAHAK KONGHAK, 31(6), 715 (1993)
Knoezinger H, Krietenbrink H, J. Chem. Soc.-Faraday Trans., 71, 2421 (1975)
Choi KH, Lee HI, Chokmae, 8, 22 (1992)
Nyquist RA, Kagel RO, "Infrared Spectra of Inorganic Compounds," Academic Press, New York and London (1971)
Foster DS, Lesline SE, Encyclopedia of Industrial Chemical Analysis, Interscience Ltd. New York, London, Sydney, Toronto (1978)
Raccanelli A, Maddalena A, J. Am. Ceram. Soc., 59, 425 (1976)

[Referenced By]

[1] Mokwa W, Kohl D, Heiland G, Sens. Actuator, 8, 101 (1986)

[2] Eguchi K, Cauhane JS, Lucat C, Videau JJ, Sens. Actuator, 17, 319 (1989)

[3] Weixing Z, Lingjuan Z, Sens. Actuator, 19, 117 (1989)

[4] Schierbaum KD, Sens. Actuator, 1, 171 (1989)

[5] Coles GSV, Williams G, Sens. Actuator, 3, 7 (1991)

[6] Anderson JR, Boudact M, "Catalysis Science and Technology," 3, Springer-Verlag, Berlin Heidelberg, New York (1982)

[7] Sales BC, Surf. Sci., 112, 272 (1981)

[8] Yamazoe N, Kurokawa Y, Seiyma T, Sens. Actuators, 4, 283 (1991)

[9] Coles GSV, Bond SE, Williams G, Sens. Actuators B-Chem., 4, 485 (1991)

[10] Nanto H, Sokooshi H, Usuda T, Transducers, 91, 596 (1991)

[11] Yasunaga S, Sunahara S, Ihokura K, Transducers, 85, 393 (1985)

[12] Moon SM, "Chemical Product Dictionary," 한국사전연구원, p. 858

[13] Park HD, Jo SG, Sohn JR, Lee DD, J. Korean Sens. Soc., 1, 107 (1992)

[14] Sohn JR, Cho SG, Park HD, Lee DD, HWAHAK KONGHAK, 31(6), 715 (1993)

[15] Knoezinger H, Krietenbrink H, J. Chem. Soc.-Faraday Trans., 71, 2421 (1975)

[16] Choi KH, Lee HI, Chokmae, 8, 22 (1992)

[17] Nyquist RA, Kagel RO, "Infrared Spectra of Inorganic Compounds," Academic Press, New York and London (1971)

[18] Foster DS, Lesline SE, Encyclopedia of Industrial Chemical Analysis, Interscience Ltd. New York, London, Sydney, Toronto (1978)

[19] Raccanelli A, Maddalena A, J. Am. Ceram. Soc., 59, 425 (1976)