The reaction of TiCl4 with the surface of silica gel was studied by Raman spectroscopy. New bands were observed which were attributed to low-frequency vibration modes of attached Ti-species. On the basis of band deconvolution and band integration, a model is proposed to determine the relative contribution of the occurring surface reactions. This new method yields results, which are in good agreement with the previously used techniques based on elemental analysis. However, this method provides both qualitative and quantitative information in a single nondestructive experiment.