An in-plane patterning process of aggregated nanoparticle thin layers of different inorganic conducting and semiconducting materials produced in Langmuir-Blodgett precursors is developed using film irradiation with an electron beam. This film treatment performs cross-linking of the precursor organic molecules resulting in the insolubility of the hydrocarbon matrix in organic solvents and in the impossibility of particle aggregation in the exposed regions. After immersion of the film into the organic solvent, the exposed areas remain insulating while conducting and semiconducting layers are formed in the nontreated zones due to particle aggregation. The result of patterning is demonstrated by Brewster angle and fluorescent microscopies. The difference of electric properties of treated and nontreated regions is shown by measuring current-voltage characteristics.