Thin Solid Films, Vol.414, No.2, 216-223, 2002
Processing and characterization of solution deposited Pb-1.1(Zr0.58Fe0.2Nb0.2Ti0.02)O-3 thin films
High quality ferroelectric thin films with the stoichiometry Pb-1.1(Zr0.58Fe0.2Nb0.2Ti0.02)O-3 (PZFNT) have been processed via chemical solution deposition on textured (1 1 1) Pt/Ti/SiO2/Si substrates. X-ray diffractometry and scanning electron microscopy investigations show that full transformation from pyrochlore to perovskite phase is accomplished after annealing at 750 T for 20 min. The temperature dependence of the dielectric permittivity (epsilon(r)) measured at different frequencies shows two maxima. The first one occurs in the vicinity of 110 degreesC and belongs to the low-to-high temperature rhombohedral phase transition. The second maximum is attributed to Curie point, and is found to be strongly dependent on frequency, which indicates relaxor type behaviour. The remnant polarization and coercive field are determined from ferroelectric hysteresis measurements as 6.5 muC/cm(2) and 25 kV/cm, respectively. Values of epsilon(r) are measured as 1490 and 1350 at 0.5 and 10 kHz respectively, and are much higher than the value reported for bulk ceramic material. The results are discussed in terms of microstructure and doping effects on the properties.