화학공학소재연구정보센터
Journal of Chemical Engineering of Japan, Vol.35, No.3, 309-312, 2002
Influence of a contact angle on the thinning rate of a liquid film on a rotating substrate
The thinning rate of the remaining liquid film on rotating substrates with different static contact angles was measured. It was found that the thinning rate of a liquid film increased when the static contact angle between the liquid and the substrate increased. Emslie's equation was modified to account for the effect of the static contact angle. Then it was shown that the thinning rate of the remaining liquid film predicted by the modified Emslie equation agreed well with the measured thinning rate. It is therefore concluded that we can use the equation to determine the appropriate processing time for blowing away a liquid film at a static contact angle.