Journal of Vacuum Science & Technology A, Vol.20, No.3, 950-952, 2002
Secondary electron emission for layered structures
Semiempirical theory for secondary electron emission is extended to cover the layered structure. Secondary electron emission for the two-layered structure. i.e.. a thin film on a substrate, is calculated and compared with the experiment. Good agreement between the two indicates the usefulness of this theory for the layered structure.