화학공학소재연구정보센터
Journal of the Electrochemical Society, Vol.149, No.9, C464-C468, 2002
Deposition of amorphous SexTe1-x thin film alloys by a novel photochemical deposition technique and their analysis
Amorphous SexTe1-x (x = 0.63 to 0.96) thin-film alloys have been deposited by a recently established, novel photochemical deposition technique. The deposited films were analyzed for various properties by X-ray diffraction (XRD), Raman spectroscopy, Auger electron spectroscopic (AES) analysis, optical studies, etc. The XRD results indicated the amorphous nature of the deposited films. The Raman spectrum exhibited the presence of optical phonon peaks corresponding to the vibration of Se-Se, Te-Te, and the Se-Te bonds. The AES study confirmed the presence of the main constituent elements. The energy bandgap (E-g) of the deposited films was determined from the optical study. The composition of the deposited films was deduced by means of energy bandgap values. The surface morphology of the films was analyzed by scanning electron microscopy.