The X-ray diffraction measurement for superionic conducting glass 5Agl-3Ag(2)O-2V(2)O(5) was carried out at 12, 100, 200 and 290 K. The temperature dependence of structure factor S(Q) of 5Agl-3Ag(2)O-2V(2)O(5) has been discussed based on the theoretical treatment that includes thermal vibration of atoms in noncrystalline materials. The effective overall Debye-Waller temperature parameter B increases with the increase of temperature.