Dense and uniform EuxY2-xSiO5 (EYSO) thin films with an X-1-Y2SiO5 structure were prepared by metallorganic decomposition (MOD). The photoluminescence (PL) and triboluminescence of the EYSO thin films were first investigated with relation to structure and composition. The experimental results show that the emission intensity of the PL and triboluminescence of the EYSO films increases with increasing crystallinity. The strongest photoluminescence and triboluminescence were achieved by the EYSO films with the europium contents of 20 and 25 at.%, respectively. In addition, the site selective emission involved within the D-5(0) --> F-7(1) transitions at room temperature can be observed in the EYSO thin films depending on the position of the europium ions occupied in the lattice.