Second-order Moller-Plesset perturbation theory investigations indicate that the highly strained three- and four-membered semiconductor ring systems A(3)R(3)(+), A(2)BR(3)(+), GeSiCR3+ A(3)R(3)Ha, and A(4)R(4)(2+) (A,B=C,Si,Ge; R=H, SiH3; Ha=F, Cl, Br) exhibit aromaticities featured with the delocalized pi orbitals perpendicular to the ring planes.