The formation and structure of multilayer films containing a cationic polyelectrolyte and anionic silica nanoparticles were studied by means of ellipsometry and atomic force microscopy. Three types of silica particles of different sizes were examined. The density and thickness of the films as well as the adsorption kinetics appear to be strongly dependent on the choice of particle; smaller particles favor the formation of smooth and dense films with a higher content of the inorganic component.