화학공학소재연구정보센터
Journal of Vacuum Science & Technology A, Vol.20, No.6, 1964-1968, 2002
Studies on electron behaviors at downstream region of a neutral loop discharge plasma
The measurements of electron temperature, electron density, and ion current density at the plasma downstream region in a neutral loop discharge (NLD) plasma were performed using a double probe. Based on these results and the theoretical analyses of electron behaviors. the entire structure of the NLD plasma was discussed. It was concluded that the obtained profiles of the electron temperature, density, and ion current density at the downstream and throughout the intermediate regions were the mirror of profiles at the plasma source region. In addition, laser Thomson scattering measurements of the electron temperature and density at the downstream region were performed in order to include the quantitative evaluation phase.