화학공학소재연구정보센터
Thin Solid Films, Vol.419, No.1-2, 105-113, 2002
Small-angle X-ray scattering and wide-angle X-ray diffraction on thermally annealed nanostructured TiO2 films
Films of nanostructured titanium dioxide MW on glass substrates, prepared and annealed by different procedures (sol-gel and chemical vapour deposition), were examined by small-angle X-ray scattering and wide-angle X-ray diffraction. By treating a film as a two-phase system of grains and pores, the corrected relative surface of phases, S-VC, was introduced and calculated as a morphological parameter that combines the relative surface and the volume fractions of the two phases, Its behaviour during the film annealing was predicted and tested on TiO2 films. The analysis of evolution of films during thermal annealing treatment is given by means of corrected relative surface correlated with the grain size and structure.