Terbium-doped aluminum oxide films (Al2O3:Tb) were deposited by spray pyrolysis technique using aluminum and terbium acetylacetonates as precursors at temperatures up to 600degreesC. Room temperature cathodoluminescent and photoluminescent characteristics of the films have been studied as a function of the deposition parameters such as doping concentrations and substrate temperature. The observed emission has the spectral characteristics typical of radiative transitions among the electronic energy levels associated with the Tb3+ ion. Ultraviolet-visible transmission measurements show that the films are highly transparent in the visible region (a percent transmittance above 88% is observed). Atomic force microscopy measurements indicate that the surface of the films is very flat, showing an average surface roughness of 14 Angstrom or less. The chemical composition of the films as determined by energy dispersive spectroscopy is also reported. (C) 2003 The Electrochemical Society.