화학공학소재연구정보센터
Journal of Vacuum Science & Technology B, Vol.20, No.6, 2853-2856, 2002
High-resolution transfer printing on GaAs surfaces using alkane dithiol monolayers
We describe a transfer printing technique for directly patterning thin gold films onto GaAs surfaces. This additive transfer process is mediated by the presence of an alkane dithiol monolayer on the wafer surface. The transferred patterns are chemically bound to the wafer surface and they exhibit strong adhesion (i.e., they easily pass Scotch tape adhesion tests.) A variety of gold patterns with a wide range of feature sizes can be printed onto GaAs (100), (110), (211)A, and (211)B using this approach.