화학공학소재연구정보센터
Langmuir, Vol.18, No.25, 9632-9634, 2002
Patterning of solid surfaces by photocatalytic lithography based on the remote oxidation effect of TiO2
A novel technique for solid surface patterning is developed on the basis of the remote oxidation effect of TiO2 photocatalysts. A TiO2-coated quartz plate was faced to a solid substrate, that is, a glass plate modified with an ultrathin organic layer or silicon, copper, or silver plate, separated by a small gap, and the TiO2 was irradiated with UV light in air through a photomask. As a result, two-dimensional images corresponding to the photomask are obtained. Those images are based on the contrasts of nonoxidized to oxidized surfaces.