Spherical microcapsules (similar to1mm in diameter and similar to1mum in wall thickness) to be used as inertial confinement fusion targets were prepared from 6FDA-ODA polyimide by vapor deposition polymerization. Compared with the previously developed PMDA-ODA polyimide microcapsules, the 6FDA-ODA microcapsules were similar to50-fold more permeable to gases including He, D-2, O-2, N-2, Ar, and Ne, considerably more transparent in the UV-visible spectrum, and of marginally lower Young's modulus, tensile strength, and elongation at break. The microcapsules possessed amorphous morphology with an amorphous d-spacing of 5.8 Angstrom as determined by wide-angle X-ray diffraction. The cryogenic permeability of helium was measured between 133 and 295 K, and the activation energy for permeation was determined to be 12.3 kJ/mol.