The local structures around Ce and Ln atoms in Ce(1-x)Ln(x)O(2.00-y) (Ln=Y; x=0.05-0.30, Gd; x=0.10-0.30, Sm and Yb; x=0.20 and 0.30) were studied by extended X-ray absorption fine structure (EXAFS) spectroscopy. The Ce-O inter-atomic distances decreased with increasing oxygen deficiency caused by increasing the dopant content and reducing the valence of Ce in the samples. The Ce-O distances of reduced samples further decreased at high temperature. The Ln-O (Ln=Y, Gd and Yb) distances also decreased with increasing oxygen deficiency. The local structures of doped and reduced ceria were discussed in view of the phase stability of the samples.