화학공학소재연구정보센터
Thin Solid Films, Vol.422, No.1-2, 73-79, 2002
Characterization of epitaxial thin films of Bi2VO5.5 on La-doped SrTiO3 substrates prepared by coating-pyrolysis process
Epitaxial thin films of Bi2VO5.5 (BVO) were prepared on La-doped SrTiO3 (LSTO) by a coating-pyrolysis process. The BVO films were (001)- and (114)-oriented on LSTO(100) and (110), respectively. Atomic force microscopic observations showed that very dense surfaces were obtained in the BVO films annealed at 600 degreesC and p(O2) = 10(-4) atm. The step heights of the BVO(001) film were in the range of 2-12 nm, each approximately corresponding to a multiple of the c-axis parameter of BVO. The low-p(O2) -processed and O-2-postannealed BVO films resulted in reproducible P-E hysteresis loops for both orientations, although somewhat leaky characteristics were observed at higher applied voltages. Anisotropic behavior based on the orientation difference was clearly observed.