The electrodeposition of Bi-Te alloy films from nitric acid solutions containing TeO2 and Bi-ethylenediaminetetraacetic acid (Bi-EDTA) complex was investigated. The product, composition, and surface morphology of Bi-Te alloy films were examined using an X-ray diffraction, inductively coupled plasma atomic emission spectroscopy, and scanning electron microscopy. In the solution containing TeO2 and Bi-EDTA complex, bismuth deposits underpotentially in the potential range between -0.05 and -0.25 V, so that Bi2Te3 films are formed. In the potential region between -0.30 and -0.50 V, a limiting current is observed, the value of which is equal to the sum of the limiting currents observed for solutions containing TeO2 or the Bi-EDTA complex. The composition of films deposited in this potential range can be controlled by the composition of the solution. (C) 2003 The Electrochemical Society.