The surface modification of poly(vinylidene fluoride) (PVDF) film induced by remote Ar, H-2, and O-2 plasmas have been investigated using contact angle measurement, X-ray photoelectron spectroscopy, and scanning probe microscope. The contact angle of water shows an improvement in the PVDF surface wettability during short plasma exposure time. Three remote plasmas treated PVDF sheet surfaces occurred dehydrofluorination and oxidation reactions simultaneously. Remote hydrogen plasma was the most effective in defluorination reactions and remote oxygen plasma was unfavorable to abstract fluorine atoms.