Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology A, Vol.21, No.3, 825-826, 2003 DOI10.1116/1.1558551 Export Citation Highly oriented SrTiO3 thin film on Si deposited by magnetron sputtering Wang Y, Chan HLW, Cheng YL, Choy CL Please enable JavaScript to view the comments powered by Disqus.
