Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.21, No.1, 337-337, 2003 Export Citation Papers from the 14th International Vacuum Microelectronics Conference - 12-16 August 2001 Davis, California - Preface Hunt CE, Chakhovskoi AG, Chubun NN, Hajra M Please enable JavaScript to view the comments powered by Disqus.